PhD in applied physics

In the Integrated Devices and Systems (IDS) group, we will start two new research projects on the design, fabrication, and characterisation of MEMS devices./nThe first project will focus on a new type of gas flow sensor that is based on the deformation of integrated mechanical structures due to the forces exerted by the gas flow through the silicon chip. By combining such sensors with thermal flow sensors on a single chip, we expect that, besides mass flow, many relevant gas parameters can be measured like thermal conductivity, density, specific heat, and dynamic viscosity./nThe second project will focus on a new type of MEMS microphones, specifically aiming at acoustic monitoring applications that require ultra low power operation./nIn both projects we will work closely together with experts in electronic circuit design to realize the electronic interfacing for the sensors, in case of the flow sensors with the Electronic Instrumentation Lab at the TU Delft, and in case of the microphones with the IC Design group at the University of Twente./nLocation: University of Twente, Twente, Netherlands. The fabrication will take place in the MESA+ cleanroom.